Laboratory based X-ray photoemission core-level spectromicroscopy of resistive oxide memories
نویسندگان
چکیده
منابع مشابه
Laboratory based X-ray photoemission core-level spectromicroscopy of resistive oxide memories.
HfO2-based resistive oxide memories are studied by core-level spectromicroscopy using a laboratory-based X-ray photoelectron emission microscope (XPEEM). After forming, the top electrode is thinned to about 1 nm for the XPEEM analysis, making the buried electrode/HfO2 interface accessible whilst preserving it from contamination. The results are obtained in the true photoemission channel mode fr...
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ژورنال
عنوان ژورنال: Ultramicroscopy
سال: 2017
ISSN: 0304-3991
DOI: 10.1016/j.ultramic.2017.03.026